Micro and Nanofabrication Clean Room

The Micro and Nanofabrication Clean Room is an open access facility that aims at helping national and international research groups to carry out R&D activities thanks to the availability of a set of complete micro and nanotechnologies and processes housed in a highly specialised Clean Room environment devoted to R&D&i of excellence, and driven by an expert team. Such support ranges from technology awareness to the development of basic demonstrators, or small series of prototypes.

The Micro and Nanofabrication Clean Room (SB-CSIC) is one of the key scientific-technological facilities designated by the Spanish Ministry of Science and Innovation, constituting the ICTS MICRONANOFABS distributed in three nodes, along with NTC and ISOM.

Micro and Nano enabling technologies are considered by the European Commission disruptive technologies of horizontal nature that are key for many industrial and societal applications and vital for the maintenance of jobs in Europe. Microelectronics and Nanotechnology are part of the Key Enabling Technologies -KET's- concept.

The main activities have been addressed to: 

• Semiconductor devices including power devices and radiation detectors;
• Sensors, actuators and MEMS;
• Nanoscale devices and actuators;
• Lab-on a chip systems; and polymer devices.

The range of applications covered by the ICTS-SB-CSIC devices products is very broad, including biomedical applications, environment, food, energy and mobility, security, communications and consumer electronics.