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Wafer Electrical Characterization Laboratory

The main activities of this service deal with:

  1. Parametric test
  2. Test structure design and characterization
  3. New on-wafer measurement techniques set-up
  4. Electronic Device Characterization


Parametric test system

Semi-automatic parametric test station, based on a Süss Microtech PA200 semi-automatic prober and an Agilent 41000 Parametric Test System. It has 4 SMU units, a CV meter and a switching matrix. Connection to the wafer is done through probecard.


Apart from the parametric testing system, we have 4 semi-automatic prober machines available:

  • MPI TS2000-SE
  • Wentworth AWP 1050 (Clean Room)
  • KarlSüss PA200
  • MPI TS2000-SE thermal (-40 ºC to 300 ºC)

It can be contacted on wafer or chip using micro manipulators or prober card.

General purpose on-wafer measurement equipment

These probers can be used together with the available electrical measurement equipment:

  • 4 semiconductor parameter analysers:
    • Keysight B1500
    • HP4155B
    • 2 Keithley 4200, both include 4 SMU and one with CV module
  • CV measurement equipment:
    • Keysight E4990
    • HP4280A
    • HP4192A
  • Other small auxiliary equipment such as Keithley 2600, Keithley 2470, etc.