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SAM/SEM Laboratory

The SAM / SEM Laboratory includes a Gen-5 (Sonoscan) Scanning Acoustic Microscope (SAM), a thermal cycling/ageing test bench for power devices and systems reliability analysis and an Auriga-40 (Carl Zeiss) Scanning Electron Microscope (SEM) with Energy-dispersive X-ray spectroscopy (EDX) analysis system.

Main Activities

  • SAM inspection of interfases and joints on encapsulated devices, subsystems and systems (bonding analysis, delamination between layers, inspection of joints between bonded wafers, in depth inspection of microstructures, etc).
  • Tests of reliability (thermal cicling, ageing, etc...) mainly based on Instec thermostated chamber (-80 ° C / + 400ºC) with different polarization and measurement channels available.
  • High resolution electron microscopy (SEM) inspection and EDX analysis.

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